UW NNIN Washington Nanofabrication Facility



The University of Washington – Washington Nanofabrication Facility (UW WNF) is a national user facility that is a part of the National Nanotechnology Infrastructure Network (NNIN).  Located on the University of Washington, Seattle campus, UW WNF is a full service micro and nanotechnology user facility and is the largest public access fabrication center in the Pacific Northwest, with 15,000sf of laboratories, cleanrooms, and user spaces focused on enabling basic and applied research, advanced research and development, and prototype production.  With substantial equipment and developed capabilities, UW WNF bridges academia with local start-ups, businesses, and professional organizations and seeks to promote economic and job growth in the local region by fostering innovation.  Nationally and internationally, UW WNF provides foundry services (remote use) through which finite fabrication and characterization efforts can be performed by expert staff engineers.  To start using this premiere facility, please click here.

Distinguished Sponsors

WNF operates and grows in capability through the gracious sponsorship of several organizations, charitable trusts, and companies.


The Washington Research Foundation advocates and promotes technology development in the life sciences, information technology, and physical sciences to spur entrepreneurial growth in the Pacific Northwest.  WRF has identified UW WNF as a key strategic resource for bridging the commercialization gap for start-up companies.  WNF staves venture capital dilution by offering high value equipment when it is needed without any of the upfront or cost of ownership burdens.


The M.J Murdock Charitable Trust seeks to enrich the quality of life in the Pacific Northwest through the provision of grants and enrichment programs to organizations seeking to strengthen the region’s educational, spiritual, and cultural base.  The Murdock Charitable Trust has identified WNF as a key resource for scientific exploration and education in the region and has enabled the purchase of an advanced Plasma Enhanced Chemical Vapor Deposition (PECVD) tool.


Company partnerships and in-kind donations enable WNF to establish and maintain leading technological capabilities in semiconductor and sensor fabrication, analysis, and advanced packaging domains.  Recently, GCE Market‘s, a trusted supplier of refurbished capital equipment, in-kind donation brought a dual beam system to UW.

ClassOneTech_logo_medRecently,WNF established a partnership with ClassOne Technology, a manufacturer  of new wet process tools, who also provided in-kind donation to establish a 100-200mm wafer plating capability within WNF. This system will be focused on advanced wafer plating applications for Through Silicon Vias (TSVs), MEMS, and Wafer-Level Packaging (WLP).

nanoTech logo The Microfabrication Facility operates jointly with the NanoTech User Facility at the University of Washington. National Nanotechnology Infrastructure Network logo A member of the National Nanotechnology Infrastructure Network.